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Accueil > Groupes de recherche > Physique des solides > Equipe "Matière Condensée et Irradiation : du Fondamental au Fonctionnel" > Microstructural evolution and structural functionalization by ion beams > Surface functionalization by focused ion beam

Surface functionalization by focused ion beam

Focused Ion Beam (FIB) microscope is a versatile tool, allowing surface study, nanodevice synthesis, direct nano-lithography and specific TEM samples preparation.

Since the last five years, thanks to the funding of CNANO (project Dynavo), Triangle de la physique (project FibNanoSynth) and the Univ Paris-Sud (PPF SPINEL), we have improve our SEM/FIB setup with in-situ nano-manipulators, EDS detector, and new software facilities for complex beam milling design.

All these functionalities lead us to numerous collaborations with different scientific skin (see publication list).

Contact : Franck Fortuna